Erik Loopstra (NL) and Vadim Banine (NL/RU)
Extreme ultraviolet lithography

About the invention

The next generation of smaller, faster, more efficient microchips have switches just 5 nm in size. They are made with a new light source and lithography process developed by a team including Dutchman Erik Loopstra and Dutch-Russian Vadim Banine.

More details on www.epo.org